COW Inspection System
Feature：
1. Automatic loading and unloading, with bar-code reading.
2. High resolution optical system.
3. High Speed and high precision inspection system.
Specification ：
1. Application：2”& 4” COW.
2. Chip Size：6mil~46mil.
3. Inspected Items：Scratch, contamination, broken line, crack, ITO disappear, gold remainder on emitting area, EPI defect,etc.
4. Image Resolution：1.4um/pixel.
5. Cassette：Two cassettes, Each cassette contains 25 PCS wafer.
6. Machine Dimensions：810mm(W) x 727mm(D) x1852mm(H).
7. Machine Weight：250kg.
8. Throughput：50 pcs/hour (2 inch wafer).
